Hydrogen reintroduction by forming gas annealing to LPCVD silicon nitride coated structures

Citation

Jin, H, Weber, K, Deenapanray, P et al 2006, 'Hydrogen reintroduction by forming gas annealing to LPCVD silicon nitride coated structures', Journal of the Electrochemical Society, vol. 153, no. 8-9, pp. G750-G754.

Year

2006

Fields of Research

  • Materials Engineering Not Elsewhere Classified
  • Electrical And Electronic Engineering Not Elsewhere Classified

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