Hydrogen reintroduction by forming gas annealing to LPCVD silicon nitride coated structures
Citation
Jin, H, Weber, K, Deenapanray, P et al 2006, 'Hydrogen reintroduction by forming gas annealing to LPCVD silicon nitride coated structures', Journal of the Electrochemical Society, vol. 153, no. 8-9, pp. G750-G754.Year
2006Fields of Research
- Materials Engineering Not Elsewhere Classified
- Electrical And Electronic Engineering Not Elsewhere Classified