Characterization of the Si-SiO2 Interface Following Room Temperature Ammonia Plasma Exposure

Citation

Jin, H, Weber, K & Smith, P 2007, 'Characterization of the Si-SiO2 Interface Following Room Temperature Ammonia Plasma Exposure', Journal of the Electrochemical Society, vol. 154, no. 6, pp. H417-H421.

Year

2007

Fields of Research

  • Manufacturing Engineering Not Elsewhere Classified
  • Materials Engineering Not Elsewhere Classified

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