Hydrogen Passivation of LPCVD Si3N4/SiO2/Si Stacks by Ammonia Plasma Treatment

Citation

Jin, H, Weber, K & Blakers, A 2007, 'Hydrogen Passivation of LPCVD Si3N4/SiO2/Si Stacks by Ammonia Plasma Treatment', Journal of the Electrochemical Society, vol. 154, no. 6, pp. H430-H434.

Year

2007

ANU Authors

Fields of Research

  • Manufacturing Engineering Not Elsewhere Classified
  • Materials Engineering Not Elsewhere Classified

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