Hydrogen Passivation of LPCVD Si3N4/SiO2/Si Stacks by Ammonia Plasma Treatment
Citation
Jin, H, Weber, K & Blakers, A 2007, 'Hydrogen Passivation of LPCVD Si3N4/SiO2/Si Stacks by Ammonia Plasma Treatment', Journal of the Electrochemical Society, vol. 154, no. 6, pp. H430-H434.Year
2007Fields of Research
- Manufacturing Engineering Not Elsewhere Classified
- Materials Engineering Not Elsewhere Classified