Particle-in-cell simulations of high frequency capacitively coupled plasmas including spatially localised inductive-like heating

Citation

Engelbrecht, M, Boswell, R, Ridgers, C et al. 2023, 'Particle-in-cell simulations of high frequency capacitively coupled plasmas including spatially localised inductive-like heating', Plasma Sources Science and Technology, vol. 32, no. 12.

Year

2023

ANU Authors

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