Diffusion and Defect formation in Ion Implanted Si nanostructures
Citation
Hogg, S, Kluth, P, Lenk, S et al 2002, 'Diffusion and Defect formation in Ion Implanted Si nanostructures', International Conference on Ion Implantation Technology 2002, ed. B Brown, Institute of Electrical and Electronics Engineers (IEEE Inc), United States, p. 682.Year
2002ANU Authors
Field of Research
- Soft Condensed Matter