Diffusion and Defect formation in Ion Implanted Si nanostructures

Citation

Hogg, S, Kluth, P, Lenk, S et al 2002, 'Diffusion and Defect formation in Ion Implanted Si nanostructures', International Conference on Ion Implantation Technology 2002, ed. B Brown, Institute of Electrical and Electronics Engineers (IEEE Inc), United States, p. 682.

Year

2002

Field of Research

  • Soft Condensed Matter

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