Characterisation of silicon oxynitride thin films and their response to swift heavy-ion irradiation

Citation

Mota Santiago, P, Nadzri, A, Kremer, F et al. 2022, 'Characterisation of silicon oxynitride thin films and their response to swift heavy-ion irradiation', Journal of Physics D: Applied Physics, vol. 55, no. 14, pp. 1-17.

Year

2022

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