Fabrication of high aspect ratio structures in silicon independent of crystal orientation using metal assisted etching

Citation

Booker, K, Rahman, S, Stocks, M et al. 2019, 'Fabrication of high aspect ratio structures in silicon independent of crystal orientation using metal assisted etching', Journal of Micromechanics and Microengineering, vol. 29, no. 6, pp. 1-5.

Year

2019

Updated:  06 March 2024 / Responsible Officer:  Director (Research Services Division) / Page Contact:  Researchers