Depth profiling of ion-implanted samples by high-energy electron scattering

Citation

Trombini, H, Vos, M, Elliman, R et al. 2020, 'Depth profiling of ion-implanted samples by high-energy electron scattering', Journal of Physics D: Applied Physics, vol. 53.

Year

2020

Field of Research

  • Condensed Matter Characterisation Technique Development

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