Metastable CF and CF2 molecules in CF4 inductively-coupled plasmas

Citation

Booth, J & Corr, C 2006, 'Metastable CF and CF2 molecules in CF4 inductively-coupled plasmas', Plasma Sources Science and Technology, vol. 15, pp. 112-116.

Year

2006

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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