Metastable CF and CF2 molecules in CF4 inductively-coupled plasmas
Citation
Booth, J & Corr, C 2006, 'Metastable CF and CF2 molecules in CF4 inductively-coupled plasmas', Plasma Sources Science and Technology, vol. 15, pp. 112-116.Year
2006ANU Authors
Field of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges