Nanometer Patterning of Thin CoSi2 Films by Application of Local Stress

Citation

Kluth, P, Detavernier, C, Zhao, Q et al 2001, 'Nanometer Patterning of Thin CoSi2 Films by Application of Local Stress', Microelectronic Engineering, vol. 55, pp. 177-182.

Year

2001

Field of Research

  • Renewable Power And Energy Systems Engineering (Excl. Solar Cells)

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