Nanometer Patterning of Thin CoSi2 Films by Application of Local Stress
Citation
Kluth, P, Detavernier, C, Zhao, Q et al 2001, 'Nanometer Patterning of Thin CoSi2 Films by Application of Local Stress', Microelectronic Engineering, vol. 55, pp. 177-182.Year
2001ANU Authors
Field of Research
- Renewable Power And Energy Systems Engineering (Excl. Solar Cells)