Nanometer Patterning of Epitaxial CoSi2 on Silicon-on-Insulator Substrates

Citation

Zhao, Q, Kluth, P, Winnerl, S et al 2002, 'Nanometer Patterning of Epitaxial CoSi2 on Silicon-on-Insulator Substrates', Microelectronic Engineering, vol. 60, pp. 183-190.

Year

2002

ANU Authors

Field of Research

  • Renewable Power And Energy Systems Engineering (Excl. Solar Cells)

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