Effect of temperature and incident ion energy on nanostructure formation on silicon exposed to helium plasma
Citation
Thompson, M, Shi, Q, Kajita, S et al. 2020, 'Effect of temperature and incident ion energy on nanostructure formation on silicon exposed to helium plasma', Plasma Processes and Polymers, vol. 17, no. 12, pp. 1-7.Year
2020ANU Authors
Field of Research
- Surfaces And Structural Properties Of Condensed Matter
