Profiling As plasma doped Si/SiO2 with molecular ions

Citation

Trombini, H, Alencar, I, Marmitt, G et al. 2019, 'Profiling As plasma doped Si/SiO2 with molecular ions', Thin Solid Films, vol. 692.

Year

2019

Field of Research

  • Electronic And Magnetic Properties Of Condensed Matter; Superconductivity

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