Nanoscale modification of silicon and germanium surfaces exposed to low-energy helium plasma
Citation
Thompson, M, Magyar, L & Corr, C 2019, 'Nanoscale modification of silicon and germanium surfaces exposed to low-energy helium plasma', Scientific Reports, vol. 9, no. 10099, pp. 1-9.Year
2019ANU Authors
Field of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges
