Nanoscale modification of silicon and germanium surfaces exposed to low-energy helium plasma

Citation

Thompson, M, Magyar, L & Corr, C 2019, 'Nanoscale modification of silicon and germanium surfaces exposed to low-energy helium plasma', Scientific Reports, vol. 9, no. 10099, pp. 1-9.

Year

2019

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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