CMOS compatible fabrication of micro, nano convex silicon lens arrays by conformal chemical vapor deposition

Citation

Zuo, H, Choi, D, Gai, X et al 2017, 'CMOS compatible fabrication of micro, nano convex silicon lens arrays by conformal chemical vapor deposition', Optics Express, vol. 25, no. 4, pp. 3069-3076.

Year

2017

Fields of Research

  • Nanophotonics
  • Nanofabrication, Growth And Self Assembly

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