Gettering Effects of Silicon Nitride Films from Various Plasma-Enhanced Chemical Vapor Deposition Conditions

Citation

Liu, A, Hameiri, Z, Wan, Y et al 2019, 'Gettering Effects of Silicon Nitride Films from Various Plasma-Enhanced Chemical Vapor Deposition Conditions', IEEE Journal of Photovoltaics, vol. 9, no. 1, pp. 78-81.

Year

2019

ANU Authors

Field of Research

  • Photodetectors, Optical Sensors And Solar Cells

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