Optimization and Characterization of Phosphorus Diffused LPCVD Polysilicon Passivated Contacts with Low Pressure Tunnel Oxide

Citation

Fong, K, Kho, T, Liang, W et al. 2018, 'Optimization and Characterization of Phosphorus Diffused LPCVD Polysilicon Passivated Contacts with Low Pressure Tunnel Oxide', 7th IEEE World Conference on Photovoltaic Energy Conversion, WCPEC 2018, IEEE, United States, pp. 2002-2005pp.

Year

2018

Field of Research

  • Photodetectors, Optical Sensors And Solar Cells

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