Sharp edged silicon structures generated using atom lithography with metastable helium atoms

Citation

Lu, W, Baldwin, K, Hoogerland, M et al 1998, 'Sharp edged silicon structures generated using atom lithography with metastable helium atoms', Journal of Vacuum Science and Technology B, vol. 16, no. 6, pp. 3846-3849.

Year

1998

Fields of Research

  • Astronomical And Space Sciences
  • Asian History
  • European History (Excl. British, Classical Greek And Roman)

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