Reduction of Cross-coupling between X-Y Axes of Piezoelectric Scanner Stage of Atomic Force Microscope for Faster Scanning

Citation

Habibullah, H, Pota, H, Petersen, I et al. 2013, 'Reduction of Cross-coupling between X-Y Axes of Piezoelectric Scanner Stage of Atomic Force Microscope for Faster Scanning', International Conference on Control Applications, CCA 2013, IEEE, Piscataway, New Jersey, US, pp. 455-460pp.

Year

2013

Field of Research

  • Engineering Not Elsewhere Classified

Updated:  15 July 2024 / Responsible Officer:  Director (Research Services Division) / Page Contact:  Researchers