Approach for improved positioning of an atomic force microscope piezoelectric tube scanner

Citation

Rana, M, Pota, H & Petersen, I 2014, 'Approach for improved positioning of an atomic force microscope piezoelectric tube scanner', Micro and Nano Letters, vol. 9, no. 6, pp. 407-411pp.

Year

2014

Field of Research

  • Nanometrology

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