High performance control of a PZT scanner for fast nanoscale positioning of atomic force microscope

Citation

Rana, M, Pota, H, Petersen, I et al. 2012, 'High performance control of a PZT scanner for fast nanoscale positioning of atomic force microscope', 2nd Australian Control Conference (AUCC 2012), Engineers Australia, USA, pp. 464-469pp.

Year

2012

ANU Authors

Field of Research

  • Control Systems, Robotics And Automation

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