LQG controller with a vibration compensator for the lateral positioning of an AFM scanner
Citation
Habibullah, H, Pota, H & Petersen, I 2012, 'LQG controller with a vibration compensator for the lateral positioning of an AFM scanner', 2nd Australian Control Conference (AUCC 2012), Engineers Australia, USA, pp. 324 - 329.Year
2012ANU Authors
Fields of Research
- Control Systems, Robotics And Automation
- Automation And Control Engineering