LQG controller with a vibration compensator for the lateral positioning of an AFM scanner

Citation

Habibullah, H, Pota, H & Petersen, I 2012, 'LQG controller with a vibration compensator for the lateral positioning of an AFM scanner', 2nd Australian Control Conference (AUCC 2012), Engineers Australia, USA, pp. 324 - 329.

Year

2012

Fields of Research

  • Control Systems, Robotics And Automation
  • Automation And Control Engineering

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