Quantification of germanium-induced suppression of interstitial injection during oxidation of silicon

Citation

Martin, T, Jones, K, Camillo-Castillo, R et al 2017, 'Quantification of germanium-induced suppression of interstitial injection during oxidation of silicon', Journal of Materials Science, vol. 52, no. 17, pp. 10387-10392.

Year

2017

Field of Research

  • Metals And Alloy Materials

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