Creep, Hysteresis, and Cross-Coupling Reduction in the High-Precision Positioning of the Piezoelectric Scanner Stage of an Atomic Force Microscope
Citation
Habibullah, H, Pota, H, Petersen, I et al. 2013, 'Creep, Hysteresis, and Cross-Coupling Reduction in the High-Precision Positioning of the Piezoelectric Scanner Stage of an Atomic Force Microscope', IEEE Transactions on Nanotechnology, vol. 12, no. 6, pp. 1125-1134pp.Year
2013ANU Authors
Field of Research
- Control Systems, Robotics And Automation
