Evaluating Depth Distributions of Dislocations in Silicon Wafers Using Micro-Photoluminescence Excitation Spectroscopy

Citation

Nguyen, H, Phang, S & MacDonald, D 2016, 'Evaluating Depth Distributions of Dislocations in Silicon Wafers Using Micro-Photoluminescence Excitation Spectroscopy', Energy Procedia, vol. 92, pp. 145-152pp.

Year

2016

ANU Authors

Field of Research

  • Processor Architectures

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