Fabrication of Ge On Insulator By Ion-Implantation And Dry Oxidation Techniques

Citation

Kim, T, Belay, K, Llewellyn, D et al 2012, 'Fabrication of Ge On Insulator By Ion-Implantation And Dry Oxidation Techniques', Microscopy and Microanalysis, vol. 18, no. S2, pp. 1634-1635.

Year

2012

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