Hyperdoping of Si by ion implantation and pulsed laser melting

Citation

Yang, W, Williams, J & Mathews, J 2016, 'Hyperdoping of Si by ion implantation and pulsed laser melting', Materials Science in Semiconductor Processing, vol. In Press, pp. -.

Year

2017

Field of Research

  • Surfaces And Structural Properties Of Condensed Matter

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