Suppression of ion-implantation induced porosity in germanium by a silicon dioxide capping layer
Citation
Tran, P, Alkhaldi, H, Gandhi, H et al. 2016, 'Suppression of ion-implantation induced porosity in germanium by a silicon dioxide capping layer', Applied Physics Letters, vol. 109, no. 8, pp. -.Year
2016Fields of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges
- Polymers And Plastics
- Nanomaterials