Atomic layer deposition for... - Researchers

Atomic layer deposition for nanofabrication and interface engineering

Citation

Liu, M, Li, X, Karuturi, S et al 2012, 'Atomic layer deposition for nanofabrication and interface engineering', Nanoscale, vol. 4, no. 5, pp. 1522-1528.

Year

2012

ANU Authors

Associate Professor Siva Karuturi

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