Graded silicon nitride films: Optics and passivation

Citation

Thomson, A, Wan, Y, Lal, N et al. 2015, 'Graded silicon nitride films: Optics and passivation', Journal of Vacuum Science and Technology A, vol. 33, no. 6, pp. 060610-1 to 060610-5.

Year

2015

ANU Authors

Field of Research

  • Photodetectors, Optical Sensors And Solar Cells

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