Passivation of c-Si surfaces by ALD tantalum oxide capped with PECVD silicon nitride
Citation
Wan, Y, Bullock, J & Cuevas, A 2015, 'Passivation of c-Si surfaces by ALD tantalum oxide capped with PECVD silicon nitride', Solar Energy Materials and Solar Cells, vol. 142, pp. 42-46.Year
2015ANU Authors
Fields of Research
- Photodetectors, Optical Sensors And Solar Cells
- Electrical And Electronic Engineering Not Elsewhere Classified