Passivation of c-Si surfaces by ALD tantalum oxide capped with PECVD silicon nitride

Citation

Wan, Y, Bullock, J & Cuevas, A 2015, 'Passivation of c-Si surfaces by ALD tantalum oxide capped with PECVD silicon nitride', Solar Energy Materials and Solar Cells, vol. 142, pp. 42-46.

Year

2015

ANU Authors

Fields of Research

  • Photodetectors, Optical Sensors And Solar Cells
  • Electrical And Electronic Engineering Not Elsewhere Classified

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