Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure
Citation
Liang, W, Suh, D, Yu, J et al. 2015, 'Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure', Physica Status Solidi A, vol. 212, no. 2, pp. 274-281.Year
2015ANU Authors
Field of Research
- Photodetectors, Optical Sensors And Solar Cells