Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure

Citation

Liang, W, Suh, D, Yu, J et al 2015, 'Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure', Physica Status Solidi A, vol. 212, no. 2, pp. 274-281.

Year

2015

Field of Research

  • Photodetectors, Optical Sensors And Solar Cells

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