Aperture and power scaling of Remote Plasma Sources for GaN film growth and development of a real-time diagnostic tool for activated Nitrogen species
Researchers
- Robert John Carman (Primary Investigator)
- Professor Roderick Boswell (Secondary Investigator)
Grant status
CompletedGrant start date
01/01/2009Grant funding
- 2008: $54,331 from Australian Research Council (ARC)
- 2009: $102,305 from Australian Research Council (ARC)
- 2010: $97,445 from Australian Research Council (ARC)
- 2011: $49,472 from Australian Research Council (ARC)