Aperture and power scaling of Remote Plasma Sources for GaN film growth and development of a real-time diagnostic tool for activated Nitrogen species

Researchers

Grant status

Completed

Grant start date

01/01/2009

Grant funding

  • 2008: $54,331 from Australian Research Council (ARC)
  • 2009: $102,305 from Australian Research Council (ARC)
  • 2010: $97,445 from Australian Research Council (ARC)
  • 2011: $49,472 from Australian Research Council (ARC)

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